JPH081484Y2 - パーティクルカウンター - Google Patents
パーティクルカウンターInfo
- Publication number
- JPH081484Y2 JPH081484Y2 JP1990071767U JP7176790U JPH081484Y2 JP H081484 Y2 JPH081484 Y2 JP H081484Y2 JP 1990071767 U JP1990071767 U JP 1990071767U JP 7176790 U JP7176790 U JP 7176790U JP H081484 Y2 JPH081484 Y2 JP H081484Y2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- pipe
- detection cell
- sample gas
- sheath
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
- 239000002245 particle Substances 0.000 title claims description 41
- 239000007789 gas Substances 0.000 claims description 150
- 238000001514 detection method Methods 0.000 claims description 42
- 239000011261 inert gas Substances 0.000 claims description 32
- 230000000149 penetrating effect Effects 0.000 claims description 3
- 238000005259 measurement Methods 0.000 description 21
- 239000004065 semiconductor Substances 0.000 description 12
- 238000004519 manufacturing process Methods 0.000 description 11
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 7
- 229910000077 silane Inorganic materials 0.000 description 7
- 239000000428 dust Substances 0.000 description 6
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 5
- 238000004140 cleaning Methods 0.000 description 5
- 229910001873 dinitrogen Inorganic materials 0.000 description 5
- XYFCBTPGUUZFHI-UHFFFAOYSA-N Phosphine Chemical compound P XYFCBTPGUUZFHI-UHFFFAOYSA-N 0.000 description 4
- 239000003345 natural gas Substances 0.000 description 3
- RBFQJDQYXXHULB-UHFFFAOYSA-N arsane Chemical compound [AsH3] RBFQJDQYXXHULB-UHFFFAOYSA-N 0.000 description 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000008030 elimination Effects 0.000 description 2
- 238000003379 elimination reaction Methods 0.000 description 2
- 239000001301 oxygen Substances 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910000073 phosphorus hydride Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000009795 derivation Methods 0.000 description 1
- 238000001784 detoxification Methods 0.000 description 1
- -1 diborane Chemical compound 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000004880 explosion Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000003595 mist Substances 0.000 description 1
- 238000011017 operating method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000003908 quality control method Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 239000002341 toxic gas Substances 0.000 description 1
- 238000005303 weighing Methods 0.000 description 1
Landscapes
- Sampling And Sample Adjustment (AREA)
- Optical Measuring Cells (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990071767U JPH081484Y2 (ja) | 1990-07-05 | 1990-07-05 | パーティクルカウンター |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1990071767U JPH081484Y2 (ja) | 1990-07-05 | 1990-07-05 | パーティクルカウンター |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0430462U JPH0430462U (en]) | 1992-03-11 |
| JPH081484Y2 true JPH081484Y2 (ja) | 1996-01-17 |
Family
ID=31609097
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1990071767U Expired - Fee Related JPH081484Y2 (ja) | 1990-07-05 | 1990-07-05 | パーティクルカウンター |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH081484Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5395588A (en) * | 1992-12-14 | 1995-03-07 | Becton Dickinson And Company | Control of flow cytometer having vacuum fluidics |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01148847U (en]) * | 1988-04-05 | 1989-10-16 |
-
1990
- 1990-07-05 JP JP1990071767U patent/JPH081484Y2/ja not_active Expired - Fee Related
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0430462U (en]) | 1992-03-11 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7614280B1 (en) | Quantitative fit test system and method for assessing respirator biological fit factors | |
| JP6561587B2 (ja) | 分析装置および排ガス処理システム | |
| KR101504753B1 (ko) | 방독면 필터 테스트 장치 | |
| JPH081484Y2 (ja) | パーティクルカウンター | |
| CN108500464A (zh) | 激光加工装置及方法 | |
| CA1260320A (en) | Turbulent incineration of combustible materials supplied in low pressure laminar flow | |
| KR102128021B1 (ko) | 터널의 내부 화재 진압을 위한 연기배출 방법 및 장치 | |
| CN111307677A (zh) | 一种激光前散射颗粒物监测装置 | |
| US5328354A (en) | Incinerator with auxiliary gas evacuation system | |
| JPH0633900A (ja) | 固体粒子と混合されているかまたは固体凝縮液若しくは粒子を生成するガスを含むエンクロージャからポンプで汲み上げるためのポンプ装置 | |
| CN117612979B (zh) | 半导体加工设备及半导体加工方法 | |
| US20040025872A1 (en) | Device for carrying out a catalytic reaction | |
| US12109522B2 (en) | Omni-directional particulate extraction inlet | |
| JP3225960U (ja) | 廃ガス処理装置 | |
| JP7150013B2 (ja) | 漏洩個所から漏出する試験ガスを妨害ガスから区別する装置および方法 | |
| EP2181888A1 (en) | Suction apparatus for suctioning combustible material | |
| CZ263092A3 (en) | Apparatus for monitoring atmosphere inside a nuclear plant safety tank | |
| KR20220075145A (ko) | 웨이퍼 엣지 파티클 제거 장치 | |
| JPS5942817B2 (ja) | 液体金属の漏洩検知装置 | |
| CN220894265U (zh) | 一种废气消除评价装置 | |
| CN205982240U (zh) | 一种分析电子级混合气组分含量的装置 | |
| JP2023523563A (ja) | 可燃性ガスの希釈 | |
| SU1063489A1 (ru) | Способ уборки взрывоопасной пыли и устройство дл его осуществлени | |
| JPH06142443A (ja) | 有害ガスの処理装置 | |
| JPH0459185A (ja) | 火花集火装置 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| S531 | Written request for registration of change of domicile |
Free format text: JAPANESE INTERMEDIATE CODE: R323531 |
|
| S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R323533 |
|
| R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
| LAPS | Cancellation because of no payment of annual fees |